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ArisMD主動減震臺/主動隔振臺

電子顯微鏡主動減震臺,FIB系統主動隔振臺,半導體設備主動減震臺,干涉儀主動隔振臺,輪廓儀主動減震臺,EBL電子束曝光機主動隔振臺

名稱:ArisMD主動減震臺/主動隔振臺
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ArisMD主動減震臺/主動隔振臺

電子顯微鏡主動減震臺,FIB系統主動隔振臺,半導體設備主動減震臺,干涉儀主動隔振臺,輪廓儀主動減震臺,EBL電子束曝光機主動隔振臺。


Description

Compact modular active vibration isolation systems counteract vibrations affecting high-precision equipment and tools.Stationedon multiple independent isolators ArisMD has the capacity to support load of massive machines up to 4000kg. Low Profile isolators provides simple installation which does not require microscope lifting and recalibration.


ArisMD主動隔振臺.png



Products Spec

1. Patented Architecture

2. Highly Damped Step Respond

3. Power and Communication Box for centralized control

4. Application-specific designs/products/ capabilities to meet your needs

5. Ability to support massive machines, tools,systems

 

DeviceArisMD300ArisMD500ArisMD1000
Dimensions (WxDxH) mm230X270X75230X270X75230X370X75
Load Capacity (kg)100~300200~500500~1000


Active Isolation Range0.5 – 100 Hz
Degrees of FreedomAll 6 degree for System

Vibration Isolation 

Performance

~8db gain on 1Hz

~20db gain on 2Hz

Settling time≤0.1 sec
Actuator ForceVertical: 80 N; Horizontal 40 N

Real-TimeDiagnostic 

Tools

Built-in Real-Time 2xChannels Oscilloscope, Real Time 2xChannel Spectrum Analyzer per Module and per 

System

Real-Time performance 

adjustment

Adaptive Control in ALL degrees of freedom in real-time. Remote Access
Input VoltageAC 80-260V/50-60Hz
Transmission ChartTransmission Chart.png



Industry fields and Applications

Vibration levels should meet the specs of sensitive tools and instruments. Mostly the Fabs, Laboratories and Cleanrooms floors often fail to meet the target devicespec.


Using K&S Devices for new Fabs, Laboratories and Clean rooms reducing overall cost, meet specs, providing ultimate vibration and adaptive vibration isolation for sensitive tools and instruments could be adjusted to changed environmental conditions.


1.  Big heavy floor microscopes – SEM,TEM

2.  Semiconductor equipment

3.  X-Ray, CT,MRI 


FEI 透射電鏡ARISMD主動隔震臺安裝案例.jpg TEM透射電子顯微鏡主動隔振臺.jpgJEOL透射電鏡ARISMD主動隔震器安裝案例JEOL透射電鏡ARISMD主動隔震器安裝案例.jpg
Tescan掃描電鏡ARISMD主動隔震臺安裝案例.png日立掃描電鏡ARISMD主動隔震系統安裝案例.jpgZeiss電鏡ARISMD主動隔震臺安裝案例.png
晶圓檢測系統ARISMD主動隔震臺安裝案例.png半導體設備主動隔震系統安裝案例.pngOEM集成方案.jpg



Installation comparisopn of ARisMDxxx systems versus another approaches


Competitive approach for installation vibration isolation systems

美國X品牌主動隔振臺.png

美國X品牌主動減震臺.png

日本X品牌主動防震臺.png


KNS Approach

KNS主動隔振臺.pngKNS主動減震臺.jpgKNS主動防震臺.jpg


Key Benefits

1. No need to lift precisiontool/instrument-K&S solution is very low profile,which easily integrating under the tool frame.

2. No need to reconfigure the tool after isolation - save additional configuration cost and time.
3. No need for heavy mechanical equipment and construction adaptations.
4. Shortest installation time - only few single hours for installation.
5. Very low installation cost.
6. Improves tools/instruments performance and quality.
7. Easy Integrates into tool/instrument workstation environment.


關聯產品:ARISTT桌上型主動隔震臺(詳情可點擊圖片了解,或致電至一科技咨詢)

萊卡干涉儀主動隔震臺.jpg原子力顯微鏡主動隔振臺.pngAFM主動減震臺.png半導體設備主動防震臺.png
半導體檢測設備主動隔震臺.png顯微鏡主動減震臺.jpg倒置顯微鏡主動隔振臺.png光學系統主動防震臺.jpg